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Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies for ten years. After FINLE was acquired by KLA-Tencor in 2000, he served as Vice President of Lithography Technology for KLA-Tencor for five years. In 2003, he received the SEMI Award for North America for his efforts in lithography simulation and education, and in 2009, he received the SPIE Frits Zernike Award for Microlithography. He is a fellow of SPIE and IEEE, and is also an adjunct faculty member at the University of Texas at Austin. In 2012, he became

Editor-in-Chief of the Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3). In 2017, he cofounded Fractilia, where he now works as Chief Technical Officer, developing metrology solutions for the measurement of roughness.

Автор – Крис А. Мак, главный редактор журнала Micro / Nanolithography, MEMS и MOEMS. Эта книга будет полезна для инженеров, исследователей, ученых, преподавателей и студентов, работающих в области оптики, фотоники и техники. Бесплатная электронная книга доступна для скачивания в цифровой библиотеке SPIE по адресу http://bit.ly/2GolS2b

Mack, Chris A. How to write a good scientific paper /Chris A. Mack. Bellingham, WA: SPIE Press, 2018. DOI: 10.1117/3.2317707